The Nanoelectronics Lab is used for dc and ac characterization of devices and circuits, primarily those fabricated in the Notre Dame Nanofabrication Facility. Characterizations performed in this lab include dc current-voltage and impedance measurements of devices as a function of temperature, 65 to 200 ºC, and S-parameter measurements from 45 MHz to 110 GHz, also over temperature. The lab is equipped for pulsed capacitance transients and lock-in conductance-voltage measurements, resistivity and Hall-effect characterization, and on-wafer testing of circuits to 60 GHz.

The lab houses two Cascade Summit 11000 probe stations, each with 200 mm diameter temperature-controlled wafer chucks to enable on-wafer testing. Configured around these wafer chucks are an Agilent 8510XF network analyzer with 1 mm coax-to-coplanar probes, Agilent B1500 and 4155B semiconductor parameter analyzers, and an Agilent 4294A precision impedance analyzer. The Agilent 4294A has a 16452 impedance/permittivity fixture for the dielectric spectroscopy of fluids and the 16451B fixture for spectroscopy of solid dielectrics. The lab also has a Tektronix 370 curve tracer, an Anritsu 3680V Universal Test Fixture for dc to 60 GHz coax-to-microstrip and coplanar transmission lines, an Agilent 86100B wideband (65 GHz) oscilloscope, and a wide range of sources and test equipment.

Cascade Microtech Summit 12000 Semiautomatic Probe Station

• Check back soon for training video, manuals, and specs

Cascade Microtech Summit 11861 Probe Station

• Variable-temperature (-65 to 200 ℃)
• Nitrogen-enclosure
• Sub-cm to 200 mm diameter wafers or pieces
• Data sheet: probe system [pdf]
• Data sheet: tungsten needle probes [pdf]
• Data sheet: ceramic blade probe tips [pdf]
• Data sheet: coaxial needle probes [pdf]

Agilent 4155C Semiconductor Parameter Analyzer

• Triaxial-guarding
• 10 fA and 2 μV resolution
• Data sheet [pdf]
• User's guide [pdf]

Agilent 4294A Precision Impedance Analyzer

• 300 mΩ to 500 MΩ
• 40 Hz to 110 MHz
• 1 mHz and 1 mΩ resolution
• Operation manual [pdf]
• Service manual [pdf]
• MOS capacitor C-V [pdf]

Agilent B1500 Semiconductor Parameter Analyzer

• User's guide [pdf]
• IV and CV measurement [pdf]
• TFET AFS instructions [pdf]
• Self-paced training manual - part 1 [pdf]
• Self-paced training manual - part 2 [pdf]
• Self-paced training manual - part 3 [pdf]
• Self-paced training manual - part 4 [pdf]
• Self-paced training manual - part 5 [pdf]

Tektronix 370A Curve Tracer

• Up to 2000 V and 10 A sourcing
• 220 Watts
• 1 nA resolution
• 2 mV resolution
• Waveform comparison and averaging
• Kelvin sense measurements
• Data sheet [pdf]

Agilent 8510XF Network Analyzer

• S-parameter measurements
• 45 MHz to 110 GHz
• 1 mm coax-to-coplanar probes
• Operation and service manual [pdf]

Agilent 86100B Wide-Bandwidth Oscilloscope

• Bandwidth 65 GHz
• Eye diagram analyser
• Time domain reflectometer/transmission
• Quick start guide [pdf]

Tektronix TDS7254 Oscilloscope

• 4 channels
• 2.5 GHz bandwidth
• 5 GS/s
• User manual [pdf]