Nanoelectronics Lab (B14 Stinson-Remick)

The Nanoelectronics Lab is used for dc and ac characterization of devices and circuits, primarily those fabricated in the Notre Dame Nanofabrication Facility. Characterizations performed in this lab include dc current-voltage and impedance measurements of devices as a function of temperature, 65 to 200 ºC, and S-parameter measurements from 45 MHz to 110 GHz, also over temperature. The lab is equipped for pulsed capacitance transients and lock-in conductance-voltage measurements, resistivity and Hall-effect characterization, and on-wafer testing of circuits to 60 GHz.

The lab houses two Cascade Summit 11000 probe stations, each with 200 mm diameter temperature-controlled wafer chucks to enable on-wafer testing. Configured around these wafer chucks are an Agilent 8510XF network analyzer with 1 mm coax-to-coplanar probes, Agilent B1500 and 4155B semiconductor parameter analyzers, and an Agilent 4294A precision impedance analyzer. The Agilent 4294A has a 16452 impedance/permittivity fixture for the dielectric spectroscopy of fluids and the 16451B fixture for spectroscopy of solid dielectrics. The lab also has a Tektronix 370 curve tracer, an Anritsu 3680V Universal Test Fixture for dc to 60 GHz coax-to-microstrip and coplanar transmission lines, an Agilent 86100B wideband (65 GHz) oscilloscope, and a wide range of sources and test equipment.

Index of lab equipment

Agilent 4155C Semiconductor Parameter Analyzer
Agilent 4294A Precision Impedance Analyzer
Agilent B1500 Semiconductor Parameter Analyzer
Agilent 8510XF Network Analyzer
Agilent 86100B Wide-Bandwidth Oscilloscope
Agilent 16542 Impedance/Permittivity Fixture
Agilent 16451B Impedance Fixture
Anritsu 3680V Universal Test Fixture
Branson Sonicator 2510
Bruker Dimension Icon AFM (in Glovebox)
Cascade Microtech Summit 12000 Semiautomatic Probe Station
Cascade Microtech Summit 11861 Probe Station
Cascade Microtech PLC50 Cryogenic Probe Station
Olympus BX51 Optical Microscope
MBraun Glovebox
Mettler Toledo Balance
Sorvall Legend X1 Centrifuge with Fiberlite Rotor (F15-8x50cy)
Specialty Coating Systems Spin Coater (in Glovebox)
Tektronix 370A Curve Tracer
Tektronix TDS7254 Oscilloscope
Tektronix AWG710 Arbitrary Waveform Generator
VWR Vacuum Oven

You must be trained before using the equipment: Training [pdf]

As a user, you have these responsibilities:
Rules for access [pdf]

Procedures [pdf]

Food and drink policy [pdf]

 


Agilent 4155C Semiconductor Parameter Analyzer

  • Triaxial-guarding
  • 10 fA and 2 μV resolution
  • Data sheet [pdf]
  • User's guide [pdf]

 

Agilent 4294A Precision Impedance Analyzer

  • 300 mΩ to 500 MΩ
  • 40 Hz to 110 MHz
  • 1 mHz and 1 mΩ resolution
  • Operation manual [pdf]
  • Service manual [pdf]
  • MOS capacitor C-V [pdf]
equipment photo

Agilent B1500 Semiconductor Parameter Analyzer

  • User's guide [pdf]
  • IV and CV measurement [pdf]
  • TFET AFS instructions [pdf]
  • Self-paced training manual - part 1 [pdf]
  • Self-paced training manual - part 2 [pdf]
  • Self-paced training manual - part 3 [pdf]
  • Self-paced training manual - part 4 [pdf]
  • Self-paced training manual - part 5 [pdf]

 

Agilent B1500A photo

Agilent 8510XF Network Analyzer

  • S-parameter measurements
  • 45 MHz to 110 GHz
  • 1 mm coax-to-coplanar probes
  • Operation and service manual [pdf]
equipment photo

Agilent 86100B Wide-Bandwidth Oscilloscope

  • Bandwidth 65 GHz
  • Eye diagram analyser
  • Time domain reflectometer/transmission
  • Quick start guide [pdf]
equipment photo

Agilent 16542 Impedance/Permittivity Fixture

  • Dielectric spectroscopy of fluids

 

Agilent 16451B Impedance Fixture

  • Spectroscopy of solid dielectrics
  • Operation and service manual [pdf]

 

 

Agilent 16542 photo

Anritsu 3680V Universal Test Fixture

  • DC to 60 GHz
  • Coax-to-microstrip or coax-to-coplanar
  • Semiconductor or ceramic substrates
  • Data sheet [pdf]
  • Operation and maintenance manual [pdf]

 

 

 

 

 

 

Anritsu  3680 photo

Branson Sonicator 2510

  • Instruction manual [pdf]

 

Microscope image

Bruker Dimension Icon AFM (in Glovebox)

  • Features ScanAsyst automatic image optimization technology
  • Instruction manual [pdf]

 

Microscope image

Cascade Microtech Summit 12000 Semiautomatic Probe Station

  • Nucleus manual [pdf]
  • Nucleus communications guide [pdf]
  • Wavevue tutorials [pdf]
  • Quick Start Guide AUTOXYZ Nucleus 4 [pdf]
  • Wavevue IV Module Guide [pdf]
  • Wavevue Installation Guide [pdf]
  • Demo notes [pdf]

 

  • Training video available on BOX > Seabaugh folder > Cascade Summit 12000 training video.mp4
Summit 12000 photo

Cascade Microtech Summit 11861 Probe Station

  • Variable-temperature (-65 to 200 ℃)
  • Nitrogen-enclosure
  • Sub-cm to 200 mm diameter wafers or pieces
  • Data sheet: probe system [pdf]
  • Data sheet: tungsten needle probes [pdf]
  • Data sheet: ceramic blade probe tips [pdf]
  • Data sheet: coaxial needle probes [pdf]
Cascade Summitt 11861 photo

Cascade Microtech PLC50 Cryogenic Probe Station

  • Instruction manual [pdf]

 

Glove box AFM image

Olympus BX51 Optical Microscope

  • Transmission and reflection
  • Brightfield and darkfield
  • Motorized nose piece
  • 50x, 100x, 200x, 500x and 1000x magnifications using Plan Fluorite research-grace optics
  • Nomarski DIC
  • Rotatable 3" and 4" wafer stage
  • Digital camera
  • Instruction manual [pdf]

 

Microscope image

MBraun Glovebox

  • Gas: Argon
  • Glove ports: 5
  • Bays: 2 (AFM right; spin-coater left)
  • Oxygen concentration: < 0.1 ppm
  • Water concentration: < 0.1 ppm
  • Instruction manual [pdf]

 

Glove box AFM image

Mettler Toledo Balance

  • Capacity 120 g
  • Accuracy: 0.1 mg
  • Instruction manual [pdf]

 

Microscope image

Sorvall Legend X1 Centrifuge with Fiberlite Rotor (F15-8x50cy)

  • Type: Fixed angle
  • Capacity: 8 x 50 mL
  • Speed: 14,000 RPM; ~22,000 x g
  • Radius: 104 mm
  • Instruction manual [pdf]

 

Microscope image

Specialty Coating Systems Spin Coater (in Glovebox)

  • Instruction manual [pdf]

 

Microscope image

Tektronix 370A Curve Tracer

  • Up to 2000 V and 10 A sourcing
  • 220 Watts
  • 1 nA resolution
  • 2 mV resolution
  • Waveform comparison and averaging
  • Kelvin sense measurements
  • Data sheet [pdf]


Tektronix TDS7254 Oscilloscope

  • 4 channels
  • 2.5 GHz bandwidth
  • 5 GS/s
  • User manual [pdf]

 

equipment photo

Tektronix AWG710 Arbitrary Waveform Generator

  • 4.0 GS/s
  • 8-bit
  • 16 M point
  • User manual [pdf]

 

equipment photo

VWR Vacuum Oven

  • Instruction manual [pdf]

 

Microscope image

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