The Notre Dame Nanofabrication Facility is a world-class, 9,000-square-foot teaching and research cleanroom that houses a wide array of tools for material and device processing.
The NDNF consists of three large areas: a class 10,000 area that houses CMP, wafer thinning, packaging and assembly, and MBE.; and class 1000 and 100 areas that contain capabilities for metal deposition, lithography, oxidation, dielectric deposition, plasma processing, and wet-chemical processing.
This NDNF is located in the newly dedicated
Stinson-Remick Hall of Engineering.