Major Equipment

Electron-Beam and Optical Lithography and Pattern Generation

Vistec EBL system, 100 kV, 8-inch laser stage, 2 nm beam
GCA Autostep 200 i-line wafer stepper
Mann 3600F photomask pattern generator
Cobilt contact mask aligner
Karl Suss MJB-3 contact mask aligners

Materials Deposition

Leybold 5-target UHV sputtering system
Leybold 3-chamber, 16-target UHV sputtering system for magnetic materials
Leybold 8-pocket electron-beam, dual thermal evaporation system
Denton Explorer electron-beam evaporator
Three Airco FC-1800 multi-pocket electron-beam evaporators
Perkin-Elmer RF, DC magnetron, 8-inch, 3-target sputter deposition system
Cambridge Nanotech Savannah atomic layer deposition (ALD) system
Unaxis 790 plasma-enhanced chemical vapor deposition (PECVD) system
First Nano 3-tube, low-pressure chemical vapor deposition (LPCVD) system
General Air atmospheric-pressure CVD (APCVD) system
Oxford FlexAL remote plasma and thermal ALD system
Structured Materials Industries low-pressure & hot-wire CVD (LPCVD, HWCVD) system

General Fabrication and Etching

Alcatel 601E inductively coupled plasma reactive ion etch (ICP-RIE) system
Oerlikon Shuttleline inductively coupled plasma reactive ion etch (ICP-RIE) system
Oxford PlasmaPro System 100 inductively coupled plasma reactive ion etch (ICP-RIE) system
Six Thermco furnace tubes (oxidation diffusion)
Modular Process Technologies rapid thermal processor
Allwin rapid thermal processor
Plasmatherm 790 reactive ion etch system
PVA PS210 plasma asher
Tegal barrel asher
Drytek plasma asher
Logitech Orbis CMP, chemical-mechanical polishing system, Type 1CM62


Magellan 400 field-emission scanning electron microscope
Helios NanoLab DualBeam 600 SEM/FIB
Titan 80-300 300kV FEG scanning transmission electron microscope (TEM)
3D laser confocal optical microscopy
In vivo imaging, including Albira PET/SPECT/CT and Multispectral FX


KLA/Tencor P-6 profilometer
Gaertner Scientific automated ellipsometer
J. A. Woollam variable-angle spectroscopic ellipsometer
Metricon prism coupler
Filmetrics film thickness measurement system
Tencor Alphastep model 200 and model 500 surface profilometers
Veeco model FPP-5000 automatic four-point probe
Agilent B1500 semiconductor parameter analyzer with I-V and capacitance-voltage modules

Assembly and Packaging

Micro automation dicing saw
Hybond wedge bonder
Westbond die attach, ribbon bonder, and ball bonder