EE 446 Integrated Circuit Fabrication

Instructor:

Greg Snider
259 Fitzpatrick Hall
631-4148, snider.7@nd.edu
www.nd.edu/~gsnider/EE446.html
Office Hours: M 2:45 - 3:45, H 1-2 pm


TAs:

Wu Bin,
Sajid Kabeer,
Jing Zhou,

Text:

S. Wolf, "Microchip Manufacturing"


Topics

  1. Background of Integrated Circuits
  2. Photolithography
  3. Oxidation
  4. Epitaxy
  5. Ion Implantation
  6. Diffusion
  7. Thin-film Deposition
  8. Etching
  9. Contacts
  10. Packaging
  11. Circuits


Lab Procedures
  • logos