Integrated 585 GHz Hot-Electron Bolometer Mixer Using Annular Slot Antenna on Silicon Wafer

Publications

Book Chapters:

 

1. Lei Liu, “Lens-Antenna Coupled Hot-Electron Bolometers for Terahertz Detection and Imaging,” Bolometers, Edited by Dr. Unil Perera, ISBN 979-953-307-348-3. Invited Book Chapter, Dec. 07, 2011.

 

Patents:

 

1. US 20130342279 A1: Methods and apparatus for terahertz wave amplitude modulation. (Co-Inventor), 2014.

2. Provisional Patent: High performance optical controlled millimeter-wave and THz waveguide attenuator/modulator, Inventor, 2016.

3. Provisional Patent: High performance THz switches, Inventor, 2022 (pending).

 

Selected Journal Papers (Google Scholar):

 

1. P. Li, W. Wu, Y. Shi, Y. Deng, K. Dave, P. Fay, L. Liu, “Integrated broadband THz switching using photoconductivity modulation in Si-on-Sapphire substrates,” IEEE Trans. THz Sci. Technol., 2025.

2. P. Li, E. Zahedi, Y. Shi, Y. Deng, L. Liu, “Dynamically tuning and reconfiguring microwave bandpass filters using optical control of switching elements,” Microwave and Optical Technology Letters, vol. 66, no. 2, 2024.

3. Y. Shi, Y. Deng, P. Li, P. Fay, L. Liu, “Polarization-resolved TH imaging with orthogonal heterostructure backward diode detectors,” IEEE Trans. THz Sci. Technol., vol. 13, no.3, pp. 286-296, 2023.

4. P. Li, Y. Shi, Y. Deng, P. Fay, L. Liu, “Tunable and reconfigurable bandstop filters enabled by optically controlled switching elements,” IET Electronics Letters, vol. 58, no. 25, pp. 985-987, 2022.

5. Y. Deng, Y. Shi, P. Li, P. Fay, L.-J. Cheng, L. Liu, “A cost-effective approach for achieving subwavelength THz imaging using photo-induced coded-apertures on mesa array structures,” IEEE Trans. THz Sci. Technol., vol. 12, no.6, pp. 658-666, 2022.

6. A. Ullah, Y.-C. Wang, S. Yeasmin, Y. Deng, J. Ren, Y. Shi, L. Liu, L.-J. Cheng, “Reconfigurable photoinduced THz wave modulation using hybrid metal-silicon metasurface,” Optics Letters, vol. 47, no. 11, pp. 2750-2753, 2022.

7. Y. Shi, Y. Deng, P. Li, P. Fay, L. Liu, “A 200 GHz fully integrated, polarization-resolved quasi-optical detector using zero-bias heterostructure backward diodes,” IEEE Microwave and Wireless Components Letters, vol. 32, no. 7, 2022.

8. Y. Shi, Y. Deng, J. Ren, P. Li, P. Fay, L. Liu, “Computational analysis of novel high performance optically controlled RF switches for reconfigurable millmeterwave-to-THz circuits, OSA Continuum, vol. 4, no. 10, pp. 2642-2654, 2021.

9. Y. Deng, Y. Shi, P. Fay, L. Liu, “Computational analysis of optically controlled reconfigurable THz mesh filters using mesa arrays,” Microwave and Optical Technology Letters, vol. 25, no. 3, 2021.

10. S. Banerji, Y. Shi, V.-S. Su, U. Ghosh, J. Cooke, Y.-L. Kong, L. Liu, B. Sensale-Rodriguez, “Inversed designed THz spectral splitters,” IEEE Microwave and Wireless Components Letters, vol. 25, no. 5, 2021.

11. Y. Deng, J. Ren, Y. Shi, Y.-C. Wang, L.-J. Cheng, P. Fay, L. Liu, “Advanced photo-induced substrate-integrated waveguides using pillar-array structures for tunable and reconfigurable THz circuits,” Optics Express, vol. 25, no. 5, pp. 7259-7273, 2020.

12. J. Ren, Y. Deng, Y. Shi, A. Kannegulla, Y.-C. Wang, P. Fay, L.-J. Cheng, and Lei Liu, “Optically controlled reconfigurable terahertz waveguide filters based on photo-induced electromagnetic band gap structures using mesa-arrays,” OSA Continuum, vol, 1, no. 4, 1429-1436, 2018.

13. J. Ren, Z. Jiang, M. I. B. Shams, P. Fay, and Lei Liu, “Photo-induced electromagnetic bandgap structures for optically-tunable microwave filters,” Progress in Electromagnetic Research (PIER), vol. 161, no. 1, pp. 101-111, 2018.

14. J. Ren, Z. Jiang, P. Fay, J. L. Hesler, C. E. Tong, and Lei Liu, “High-performance optically-controlled variable  WR-4.3 attenuator/modulator with 60 dB range,” IEEE Microwave and Wireless Components Letters, vol. 28, no. 6, pp. 512-514, 2018.

15. S. Rahman, Z. Jiang, P. Fay, and Lei Liu, “A G-band monolithically integrated quasi-optical detector based on heterostructure backward diodes using submicron airbridges,” IEEE Trans. Microwave Theory & Technol. Vol. 66, no. 4, pp. 2010-2017, 2017.

16. M. I. B. Shams, Z. Jiang, S. Rahman, L.-J. Cheng, J. L. Hesler, P. Fay, and Lei Liu, “A 740 GHz dynamic two-dimensional beam steering and forming antenna based on photo-induced Fresnel zone plates,” IEEE Trans. THz Sci. Technol., vol.7, no.3, pp. 310-319, 2017.

17. Lei Liu, S. Rahman, Z. Jiang, W. Li, P. Fay, “Advanced THz sensing and imaging systems based on integrated III-V interband tunneling devices,” Proceedings of the IEEE, Special Issue on THz Electronics and Systems, vol. 105, no. 6, pp. 1020-1034, Jan. 2017 (Invited Paper).

18. Z. Jiang, M. I. B. Shams, P. Fay, J. L. Hesler, C. E. Tong, Lei Liu, “Investigation and demonstration of a WR-4.3 optically-controlled waveguide attenuator,” IEEE Trans. THz Sci. Technol., vol. 7, no. 1, pp. 20-26, Jan. 2017.

19. S. Rahman, Z. Jiang, H. G. Xing, P. Fay, and Lei Liu, “Integration and fabrication of high-performance Sb-based heterostructure backward diodes with nanometer-scale airbridge contacts for THz detection,” Journal of Vacuum Science and Technology, B,  vol. 34, no. 4, 2016.

20. A. Kannegulla, M. I. B. Shams, Lei Liu, L.-J. Cheng, “Photo-induced spatial modulation of THz waves: opportunities and limitations,” Optics Express,  vol. 23, no. 25, pp. 32098-32112, 2015.

21. S. Rahman, Z. Jiang, H. G. Xing, P. Fay, and Lei Liu, “Lens-coupled folded-dipole antennas for terahertz detection and imaging,” IET Microwaves, Antennas and Propagation, vol. 9, no. 11, pp. 1213-1220, 2015.

22. M. I. B. Shams, Z. Jiang, S. Rahman, J. Qayyum, H. G. Xing, J. L. Hesler, P. Fay, and Lei Liu, “Characterization of terahertz antennas using photo-induced coded-aperture imaging,” Microwave and Optical Technology Letters, vol. 57, no. 5, pp. 1180-1184, 2015.

23. M. I. B. Shams, Z. Jiang, S. Rahman, J. Qayyum, L.-J. Cheng, H. G. Xing, P. Fay, and Lei Liu, “Approaching real-time THz imaging using photo-induced coded apertures and compressed sensing,” Electron. Lett., vol. 50, no. 11, pp. 801, 2014 (feature article).

24. Z. Jiang, S. Rahman, J. L. Hesler, P. Fay, Lei Liu, “Design and characterization of tunable lens-coupled annular-slot antennas for all-electronic reconfigurable THz detectors and focal-plane arrays,” IET Microwaves, Antennas and Propagation, Special Issue on Emerging Integrated Reconfigurable Antenna Technologies, vol. 8, no. 11, pp. 842-848, 2014 (Invited Paper), .

25. A. Kannegulla, Z. Jiang, S. Rahman, M. I. B. Shames, P. Fay, H. G. Xing, L. Cheng, Lei Liu, “Coded-aperture imaging using photo-induced aperture arrays for mapping terahertz beams,” IEEE Trans. THz Science and Tech, vol. 4, no. 3, pp. 321-327, 2014.

26. Z. Jiang, S. Rahman, P. Fay, J. L. Hesler, Lei Liu, “Tunable 200 GHz lens-coupled annular-slot antennas using Schottky varactor diodes for all-electronic reconfigurable THz circuits,” Electron. Lett., vol. 49, no. 23, pp. 1428-1430, 2013.

27. L. Cheng, Lei Liu, “Optical modulation of continuous terahertz waves towards reconfigurable quasi-optical terahertz devices,” Optics Express, vol. 21, no. 23, 2013 (also selected and published in Virtual Journal for Biomedical Optics, vol. 9, no.1, 2014).

28. B. Sensale-Rodriguez, S. Rafique, R. Yan, M. Zhu, V. Protasenko, D. Jena, Lei Liu, H. G. Xing, “Terahertz imaging employing graphene modulator arrays,” Optics Express, vol. 21, no. 2, 2013.

29. B. Sensale-Rodriguez, Lei Liu, P. Fay, D. Jena, H. Xing, “Power amplification at THz via plasma wave excitation in RTD-gated HEMTs,” IEEE Trans. Terahertz Science and Technology, vol. 3, no. 2, 2013.

30. Lei Liu^(a), R. Pathak, L. Cheng, T. Wang^(b), “Real-time frequency-domain terahertz sensing and imaging of isopropyl alcohol-water mixtures on a microfluidic chip,”  Sensors and Actuators B, vol. 184, pp. 228-234, 2013.

31. B. Sensale-Rodriguez, R. Yan, Lei Liu, D. Jena, H. Xing, “Graphene for reconfigurable THz optoelectronics,” Proceedings of the IEEE, vol. 101, no. 7, pp1705-1716, 2013.

32. A. Das, S, Subhechha, T. Wang, A. Biswas, C. Megaridis*, Lei Liu*, “Quasi-Optical THz Polarizers Enabled by Ink-Jet Printed Carbon Nanowisker Composite Coatings,” Appl. Phys. Lett., vol. 101, pp. 243108, Dec. 10, 2012.

33. R. Yan, B. Sensale-Rodriguez, Lei Liu, D. Jena, H. Xing, “A graphene-based tunable terahertz metamaterial modulator,” Optics Express, vol. 20, no. 7, 2012.

34. B. Sensale-Rodriguez, R. Yan, M. Zhu, D. Jena, Lei Liu, H. Xing, “Efficient terahertz electro-absorption modulation employing graphene plasmonic structures,” Appl. Phys. Lett., vol. 101, no. 26, 2012.

35. B. Sensale-Rodriguez, R. Yan, S. Rafique, M. Zhu, V. Protasenko, M. Kelly, D. Jena, Lei Liu, H. G. Xing, “Extraordinary control of terahertz beam reflectance in graphene electro-absorption modulators,” Nano Letters, vol. 12, no. 9, 2012   

36. B. SensaleRodriguez^a, R. Yan, M. Kelly, T. Fang, K. Tahy, D. Jenna, Lei Liu^b, H. G. Xing^c, “Broadband graphene terahertz modulators enabled by intraband transitions,” Nature Communications, vol. 3, no. 780, 2012.

37. B. SensaleRodriguez^a, R. Yan, M. Kelly, T. Fang, K. Tahy, D. Jenna, Lei Liu^b, H. G. Xing^c, “Unique Prospects for Graphene-Based THz Modulators,” Appl. Phys. Lett.., vol. 99, no. 11, 2011 (Highlighted APL NEWS).

38. A. Das^*, C. M. Megaridis^a, Lei Liu^*,b, T. Wang, A. Biswas, “Terahertz Shielding and Attenuation of Superhydrophobic Carbon Nanofiber Composite Coatings Characterized by a Frequency Domain THz Spectroscopy,” (co-first and co-corresponding author)  Appl. Phys. Lett., vol. 98, no. 1, 2011.

39. Lei Liu, J. L. Hesler, H. Xu, A. W. Lichtenberger, and R. M. Weikle, II, , “A Broadband Quasi-Optical THz Detector Using a Zero Bias Schottky Diode,” IEEE Microwave and Wireless Components Letters, vol. 20, no. 9, Sep. 2010.

40. Lei Liu, H. Xu, A. W. Lichtenberger, and R. M. Weikle,II, “Integrated 585 GHz Hot-Electron Mixer Focal-Plane Arrays Based on Annular-Slot Antennas for Imaging Applictions,” IEEE Trans. Microwave Theory Tech., vol. 58, no. 7, 2010.

41. H. Xu, G. Schoenthal, Lei Liu, J. L. Hesler, and R. M. Weikle, II, “On Estimating Parasitic Capacitance in Submillimeter-Wave Planar Schottky Diodes,” IEEE Microwave and Wireless Components Letters, vol. 19, no. 2, 2009.

42. Lei Liu, H. Xu, J. Hesler, A. W. Lichtenberger, R. M. Weikle, II, “Integrated Broadband Terahertz Detectors Utilizing Superconducting Hot-Electron Bolometers,” IEEE Trans. on Appl. Supercon., vol. 19, no. 3, pp. 282-286, June 2009.

43. B. Herald, J. Schultz, H. Xu, Lei Liu, A. W. Lichtenberger, R. M. Weikle, II, “The Design, Fabrication, and Test Results of a 1.6 THz Hot-Electron Mixers with Beam Leads,” IEEE Trans. on Appl. Supercon., vol. 19, no. 3, June 2009.

44. Lei Liu, Q. Xiao, J. C. Schultz, H. Xu, A. W. Lichtenberger, and R. M. Weikle, II, “Design, Fabrication and Characterization of a Submillimeter-Wave Niobium HEB Mixer Imaging Array Based on the ‘Reverse-Microscope’ Concept,” IEEE Trans. on Appl. Supercon., vol. 17, no. 2, pp. 407-411, Jun. 2007.

45. Lei Liu, C. Caloz, and T. Itoh, "Dominant Mode (DM) Leaky Wave Antenna with Backfire-to-Endfire Scanning Capability," Electron. Lett. vol.38, no. 23, Nov. 06, 2002.

46. Lei Liu, C. Caloz, C-C. Chang, and T. Itoh, "Forward Coupling Phenomena between Artificial Left-Handed (LH) Transmission Lines," J. Appl. Phys., vol.92, no.9, pp.5560, Nov.1, 2002.

47. Lei  Liu,  Y. J. Feng, Q. G. Liu, L. Y. Wu,  E. H. Zhao, Z. L. Fu, L. X. You, L. Kang, S. Z.Yang, and P. H. Wu, “Local Microwave Properties of Metal Films Studied by a Microwave Near-Field Microscope,” Solid State Communications, vol.119, no.3, p.133-5. 2001.

48. Y. J. Feng, Lei Liu, et. al, "Local Microwave Surface Resistance Variations of The YBaCuO Thin Films Patterned by Selective Laser Irradiation and Plasma Fluorination," IEEE Trans. on Appl. Supercon., vol.11, p.123-6. 11., March 2001.

 

 

 

Selected Conference Papers:

 

1. Lei Liu, J. Ren, Y. Deng, Y. Shi, P. Fay, and L.-J. Cheng, “Optically-controlled  tunable/reconfigurable THz devices for advanced sensing, imaging and communications,” 2018 European Microwave Week (EuMW), Workshop on THz Technologies, Madrid, Spain, Sep. 23-28, 2018 (Invited Talk).

2. Y. Shi, S. Rahman, J. Ren, Y. Deng, P. Fay, Lei Liu, “An integrated polarization-resolved quasi-optical THz detector based on heterostructure backward diodes,” Lester Eastman Conference on High Performance Devices, Columbus, OH, Aug. 12-14, 2018.

3. Lei Liu, “Optically-controlled millimeterwave to THz tunable/reconfigurable devices for advanced imaging and adaptive communication,” 2018 ShanghaiTech Workshop on Emerging Devices, Circuits and systems (SWEDCS’2018), Shanghai, China, June 04-05, 2018 (Invited Talk).

4. Y. Deng, M. I. B. Shams, J. Ren, P. Fay, and Lei Liu, “High performance photo-induced substrate-integrated waveguides for tunable and reconfigurable terahertz circuits,” 29th International Symposium on Space Terahertz Technology, Pasadena, CA, USA, March 26-28, 2018.

5. J. Ren, Y. Deng, Z. Jiang, M. I. B. Shams, P. Fay, and Lei Liu, “Tunable and reconfigurable terahertz devices based on photo-induced electromagnetic band gap structures,” 29th International Symposium on Space Terahertz Technology, Pasadena, CA, USA, March 26-28, 2018.

6. Lei Liu, Z. Jiang, M. I. B. Shams, J. Ren, P. Fay, “Optically-controlled tunable and reconfigurable THz devices,” IEEE National Aerospace and Electronics Conference, Fairborn, OH, June 26-28, 2017 (Invited Talk).

7. J. A. Connors, C.-Y. E. Tong, P. K. Grimes, A. Gebreyohannes, and Lei Liu, “Measurement and design of a waveguide probe based WR 3.4 optically controlled modulator,” 28^th International Symposium on Space Terahertz Technology, University of Cologne, Cologne, Germany, Mar. 13-15, 2017.

8. Lei Liu, Z. Jiang, M. I. B. Shams, S. Rahman, P. Fay, “Dynamically tunable and reconfigurable  antennas for advanced THz sensing and imaging,” USNC-URSI National Radio Science Meeting  (NRSM), Boulder, CO, Jan. 4-6, 2017 (Abstract).

9. Jiang, S. Rahman, P. Fay, S. T. Ruggiero, Lei Liu, “Ultra-sensitive broadband terahertz quasi-optical balanced hot-electron mixers,” IEEE Applied Superconductivity Conference, Denver, CO, Sep. 4-9, 2016.

10. Lei Liu, Z. Jiang, M. I. B. Shams, P. Fay, L.-J. Cheng, “Tunable and reconfigurable THz devices for advanced imaging and adaptive wireless communications,” SPIE Optics + Photonics, San Diego, CA, Aug. 29-Sep. 1, 2016 (Invited Talk).

11. P. Fay, W. Li, S. Rahman, Z. Jiang, Lei Liu, “Advances in III-V heterostructure devices and integration for millimeter-wave and THz sensing and imaging,” Workshop on Compound Semiconductor Devices and Integrated Circuits, May, 2016 (Invited Talk).

12. Z. Jiang, M. I. B. Shams, S. Rahman, P. Fay, C. E. Tong, and Lei Liu, “A WR-4 optically-tunable waveguide attenuator with 50 dB tuning range and low insertion loss,” 27^th International Symposium on Space Terahertz Technology, Nanjing, China, Apr. 12-15, 2016.

13. M. I. B. Shams, Z. Jiang, J. Qayyum, S. Rahman, P. Fay, and Lei Liu, “A terahertz reconfigurable photo-induced Fresnel-zone-plate antenna for dynamic two-dimensional beam steering and forming,”  IEEE International Microwave Symposium (IMS), Phoenix, AZ, May 2015.

14. M. I. B. Shams, H. G. Xing, P. Fay, and Lei Liu, “Initial demonstration of THz beem-steering with photo-induced reconfigurable Fresnel zone-plates,”  IEEE Calumet Section EDS/IPS Symposium, Notre Dame, IN, 2014.

15. S. Rahman, Z. Jiang, H. G. Xing, P. Fay, and Lei Liu, “Integration of heterostructure backward diodes with submicron airbridge contacts for 585 GHz focal-plane imaging arrays,” IEEE Calumet Section EDS/IPS Symposium, Notre Dame, IN, 2014.

16. S. Rahman, Z. Jiang, H. G. Xing, P. Fay, and Lei Liu, “Design, fabrication and characterization of 585GHz integrated focal-plane arrays based on heterostructure backward diodes,” ,The 39th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Tucson AZ, 2014 (Keynote Oral Presentation).

17. M. Shams, S. Rahman, Z. Jiang, J. Qayyum, H. G. Xing, J. L. Hesler, P. Fay, and Lei Liu, “Characterizing a WR-1.5 diagonal horn antenna using photo-induced coded-aperture imaging,” The 39th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Tucson AZ, 2014.

18. P. Fay, Y. Xie, Y. Zhao, Z. Jiang, S. Rahman, B. SensaleRodriguez, H. G. Xing, and Lei Liu, “Emerging electronic device for THz sensing and imaging,” SPIE, 2014 (Invited Talk).

19. Z. Jiang, S. Rahman, P. Fay, S. T. Ruggiero, and Lei Liu, ”The design, fabrication and characterization of ultra-sensitive multiband terahertz quasi-optical balanced hot-electron mixers,” IEEE Applied Superconductivity Conference, Charlotte, NC, Aug. 10-15, 2014, accepted.

20. Z. Jiang, S. Rahman, I. M. Shames, P. Fay, J. L. Hesler, and Lei Liu, “A 200 GHz lens-coupled annular-slot antenna with 50 GHz tuning range for reconfigurable terahertz detectors” IEEE International Microwave Symposium (IMS 2014), Tampa, FL, June 2-6, 2014.

21. M. Shams, Z. Jiang, S. Rahman, J. Qayyum, and Lei Liu, “Approaching real-time terahertz imaging using photo-induced reconfigurable aperture arrays,” Oral Presentation, SPIE Defense and Security,Baltimore, Maryland, 2014.

22. Z. Jiang, S. Rahman, P. Fay, S. T. Ruggiero, and Lei Liu, “Multiband terahertz quasi-optical balanced hot-electron mixers based on dual-polarization sinuous antennas,” Oral Presentation, SPIE Defense and Security, Baltimore, Maryland, 2014.

23. R. Yan, D, Jena, B. Sensale-Rodriguez, Lei Liu, H. G. Xing, ”Near-field enhanced graphene terahertz modulators,” The 38th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Mainz, Germany, Sep. 1-6, 2013.

24. R. Yan, S. Rafique, W. Li, X. Liang, D. Jena, Lei Liu, B. Sensale-Rodriguez, H. G. Xing, “Tunable graphene-based metamaterial terahertz modulators,” CLED: Science and Innovation, San Jose, CA, June 2013.

25. S. Rahman, Z. Jiang, Y. Xie, H. Xing, P. Fay, Lei Liu, “Terahertz focal-plane arrays employing heterostructure backward diodes integrated with folded dipole antennas,” IEEE International Microwave Symposium (IMS 2013), Seattle, WA, June 2-7, 2013,

 

 

Integrated THz Heterostructure Backward Diode with Airbridge

Terahertz High-Performance Focal-Plane Array Using Planar Lens-Coupled Antennas

590 GHz THz Coded-Aperture Imaging of a letter “H” Using Compressed Sensing

美国圣母大学

 

University of Notre Dame

THz Circuits and Systems Lab