Integrated 585 GHz Hot-Electron Bolometer Mixer Using Annular Slot Antenna on Silicon Wafer

Publications

Book Chapters:

 

1. Lei Liu, �Lens-Antenna Coupled Hot-Electron Bolometers for Terahertz Detection and Imaging,� Bolometers, Edited by Dr. Unil Perera, ISBN 979-953-307-348-3. Invited Book Chapter, Dec. 07, 2011.

 

Patents:

 

1. US 20130342279 A1: Methods and apparatus for terahertz wave amplitude modulation. (Co-Inventor), 2014.

2. Provisional Patent: High performance optical controlled millimeter-wave and THz waveguide attenuator/modulator, Inventor, 2016.

3. Provisional Patent: High performance THz switches, Inventor, 2022 (pending).

 

Selected Journal Papers (Google Scholar):

 

1. P. Li, W. Wu, Y. Shi, Y. Deng, K. Dave, P. Fay, L. Liu, �Integrated broadband THz switching using photoconductivity modulation in Si-on-Sapphire substrates,� IEEE Trans. THz Sci. Technol., 2025.

2. P. Li, E. Zahedi, Y. Shi, Y. Deng, L. Liu, �Dynamically tuning and reconfiguring microwave bandpass filters using optical control of switching elements,� Microwave and Optical Technology Letters, vol. 66, no. 2, 2024.

3. Y. Shi, Y. Deng, P. Li, P. Fay, L. Liu, �Polarization-resolved TH imaging with orthogonal heterostructure backward diode detectors,� IEEE Trans. THz Sci. Technol., vol. 13, no.3, pp. 286-296, 2023.

4. P. Li, Y. Shi, Y. Deng, P. Fay, L. Liu, �Tunable and reconfigurable bandstop filters enabled by optically controlled switching elements,� IET Electronics Letters, vol. 58, no. 25, pp. 985-987, 2022.

5. Y. Deng, Y. Shi, P. Li, P. Fay, L.-J. Cheng, L. Liu, �A cost-effective approach for achieving subwavelength THz imaging using photo-induced coded-apertures on mesa array structures,� IEEE Trans. THz Sci. Technol., vol. 12, no.6, pp. 658-666, 2022.

6. A. Ullah, Y.-C. Wang, S. Yeasmin, Y. Deng, J. Ren, Y. Shi, L. Liu, L.-J. Cheng, �Reconfigurable photoinduced THz wave modulation using hybrid metal-silicon metasurface,� Optics Letters, vol. 47, no. 11, pp. 2750-2753, 2022.

7. Y. Shi, Y. Deng, P. Li, P. Fay, L. Liu, �A 200 GHz fully integrated, polarization-resolved quasi-optical detector using zero-bias heterostructure backward diodes,� IEEE Microwave and Wireless Components Letters, vol. 32, no. 7, 2022.

8. Y. Shi, Y. Deng, J. Ren, P. Li, P. Fay, L. Liu, �Computational analysis of novel high performance optically controlled RF switches for reconfigurable millmeterwave-to-THz circuits, OSA Continuum, vol. 4, no. 10, pp. 2642-2654, 2021.

9. Y. Deng, Y. Shi, P. Fay, L. Liu, �Computational analysis of optically controlled reconfigurable THz mesh filters using mesa arrays,� Microwave and Optical Technology Letters, vol. 25, no. 3, 2021.

10. S. Banerji, Y. Shi, V.-S. Su, U. Ghosh, J. Cooke, Y.-L. Kong, L. Liu, B. Sensale-Rodriguez, �Inversed designed THz spectral splitters,� IEEE Microwave and Wireless Components Letters, vol. 25, no. 5, 2021.

11. Y. Deng, J. Ren, Y. Shi, Y.-C. Wang, L.-J. Cheng, P. Fay, L. Liu, �Advanced photo-induced substrate-integrated waveguides using pillar-array structures for tunable and reconfigurable THz circuits,� Optics Express, vol. 25, no. 5, pp. 7259-7273, 2020.

12. J. Ren, Y. Deng, Y. Shi, A. Kannegulla, Y.-C. Wang, P. Fay, L.-J. Cheng, and Lei Liu, �Optically controlled reconfigurable terahertz waveguide filters based on photo-induced electromagnetic band gap structures using mesa-arrays,� OSA Continuum, vol, 1, no. 4, 1429-1436, 2018.

13. J. Ren, Z. Jiang, M. I. B. Shams, P. Fay, and Lei Liu, �Photo-induced electromagnetic bandgap structures for optically-tunable microwave filters,� Progress in Electromagnetic Research (PIER), vol. 161, no. 1, pp. 101-111, 2018.

14. J. Ren, Z. Jiang, P. Fay, J. L. Hesler, C. E. Tong, and Lei Liu, �High-performance optically-controlled variable� WR-4.3 attenuator/modulator with 60 dB range,� IEEE Microwave and Wireless Components Letters, vol. 28, no. 6, pp. 512-514, 2018.

15. S. Rahman, Z. Jiang, P. Fay, and Lei Liu, �A G-band monolithically integrated quasi-optical detector based on heterostructure backward diodes using submicron airbridges,� IEEE Trans. Microwave Theory & Technol. Vol. 66, no. 4, pp. 2010-2017, 2017.

16. M. I. B. Shams, Z. Jiang, S. Rahman, L.-J. Cheng, J. L. Hesler, P. Fay, and Lei Liu, �A 740 GHz dynamic two-dimensional beam steering and forming antenna based on photo-induced Fresnel zone plates,� IEEE Trans. THz Sci. Technol., vol.7, no.3, pp. 310-319, 2017.

17. Lei Liu, S. Rahman, Z. Jiang, W. Li, P. Fay, �Advanced THz sensing and imaging systems based on integrated III-V interband tunneling devices,� Proceedings of the IEEE, Special Issue on THz Electronics and Systems, vol. 105, no. 6, pp. 1020-1034, Jan. 2017 (Invited Paper).

18. Z. Jiang, M. I. B. Shams, P. Fay, J. L. Hesler, C. E. Tong, Lei Liu, �Investigation and demonstration of a WR-4.3 optically-controlled waveguide attenuator,� IEEE Trans. THz Sci. Technol., vol. 7, no. 1, pp. 20-26, Jan. 2017.

19. S. Rahman, Z. Jiang, H. G. Xing, P. Fay, and Lei Liu, �Integration and fabrication of high-performance Sb-based heterostructure backward diodes with nanometer-scale airbridge contacts for THz detection,� Journal of Vacuum Science and Technology, B,� vol. 34, no. 4, 2016.

20. A. Kannegulla, M. I. B. Shams, Lei Liu, L.-J. Cheng, �Photo-induced spatial modulation of THz waves: opportunities and limitations,� Optics Express,� vol. 23, no. 25, pp. 32098-32112, 2015.

21. S. Rahman, Z. Jiang, H. G. Xing, P. Fay, and Lei Liu, �Lens-coupled folded-dipole antennas for terahertz detection and imaging,� IET Microwaves, Antennas and Propagation, vol. 9, no. 11, pp. 1213-1220, 2015.

22. M. I. B. Shams, Z. Jiang, S. Rahman, J. Qayyum, H. G. Xing, J. L. Hesler, P. Fay, and Lei Liu, �Characterization of terahertz antennas using photo-induced coded-aperture imaging,� Microwave and Optical Technology Letters, vol. 57, no. 5, pp. 1180-1184, 2015.

23. M. I. B. Shams, Z. Jiang, S. Rahman, J. Qayyum, L.-J. Cheng, H. G. Xing, P. Fay, and Lei Liu, �Approaching real-time THz imaging using photo-induced coded apertures and compressed sensing,� Electron. Lett., vol. 50, no. 11, pp. 801, 2014 (feature article).

24. Z. Jiang, S. Rahman, J. L. Hesler, P. Fay, Lei Liu, �Design and characterization of tunable lens-coupled annular-slot antennas for all-electronic reconfigurable THz detectors and focal-plane arrays,� IET Microwaves, Antennas and Propagation, Special Issue on Emerging Integrated Reconfigurable Antenna Technologies, vol. 8, no. 11, pp. 842-848, 2014 (Invited Paper), .

25. A. Kannegulla, Z. Jiang, S. Rahman, M. I. B. Shames, P. Fay, H. G. Xing, L. Cheng, Lei Liu, �Coded-aperture imaging using photo-induced aperture arrays for mapping terahertz beams,� IEEE Trans. THz Science and Tech, vol. 4, no. 3, pp. 321-327, 2014.

26. Z. Jiang, S. Rahman, P. Fay, J. L. Hesler, Lei Liu, �Tunable 200 GHz lens-coupled annular-slot antennas using Schottky varactor diodes for all-electronic reconfigurable THz circuits,� Electron. Lett., vol. 49, no. 23, pp. 1428-1430, 2013.

27. L. Cheng, Lei Liu, �Optical modulation of continuous terahertz waves towards reconfigurable quasi-optical terahertz devices,� Optics Express, vol. 21, no. 23, 2013 (also selected and published in Virtual Journal for Biomedical Optics, vol. 9, no.1, 2014).

28. B. Sensale-Rodriguez, S. Rafique, R. Yan, M. Zhu, V. Protasenko, D. Jena, Lei Liu, H. G. Xing, �Terahertz imaging employing graphene modulator arrays,� Optics Express, vol. 21, no. 2, 2013.

29. B. Sensale-Rodriguez, Lei Liu, P. Fay, D. Jena, H. Xing, �Power amplification at THz via plasma wave excitation in RTD-gated HEMTs,� IEEE Trans. Terahertz Science and Technology, vol. 3, no. 2, 2013.

30. Lei Liu(a), R. Pathak, L. Cheng, T. Wang(b), �Real-time frequency-domain terahertz sensing and imaging of isopropyl alcohol-water mixtures on a microfluidic chip,�� Sensors and Actuators B, vol. 184, pp. 228-234, 2013.

31. B. Sensale-Rodriguez, R. Yan, Lei Liu, D. Jena, H. Xing, �Graphene for reconfigurable THz optoelectronics,� Proceedings of the IEEE, vol. 101, no. 7, pp1705-1716, 2013.

32. A. Das, S, Subhechha, T. Wang, A. Biswas, C. Megaridis*, Lei Liu*, �Quasi-Optical THz Polarizers Enabled by Ink-Jet Printed Carbon Nanowisker Composite Coatings,� Appl. Phys. Lett., vol. 101, pp. 243108, Dec. 10, 2012.

33. R. Yan, B. Sensale-Rodriguez, Lei Liu, D. Jena, H. Xing, �A graphene-based tunable terahertz metamaterial modulator,� Optics Express, vol. 20, no. 7, 2012.

34. B. Sensale-Rodriguez, R. Yan, M. Zhu, D. Jena, Lei Liu, H. Xing, �Efficient terahertz electro-absorption modulation employing graphene plasmonic structures,� Appl. Phys. Lett., vol. 101, no. 26, 2012.

35. B. Sensale-Rodriguez, R. Yan, S. Rafique, M. Zhu, V. Protasenko, M. Kelly, D. Jena, Lei Liu, H. G. Xing, �Extraordinary control of terahertz beam reflectance in graphene electro-absorption modulators,� Nano Letters, vol. 12, no. 9, 2012 ��

36. B. SensaleRodrigueza, R. Yan, M. Kelly, T. Fang, K. Tahy, D. Jenna, Lei Liub, H. G. Xingc, �Broadband graphene terahertz modulators enabled by intraband transitions,� Nature Communications, vol. 3, no. 780, 2012.

37. B. SensaleRodrigueza, R. Yan, M. Kelly, T. Fang, K. Tahy, D. Jenna, Lei Liub, H. G. Xingc, �Unique Prospects for Graphene-Based THz Modulators,� Appl. Phys. Lett.., vol. 99, no. 11, 2011 (Highlighted APL NEWS).

38. A. Das*, C. M. Megaridisa, Lei Liu*,b, T. Wang, A. Biswas, �Terahertz Shielding and Attenuation of Superhydrophobic Carbon Nanofiber Composite Coatings Characterized by a Frequency Domain THz Spectroscopy,� (co-first and co-corresponding author)� Appl. Phys. Lett., vol. 98, no. 1, 2011.

39. Lei Liu, J. L. Hesler, H. Xu, A. W. Lichtenberger, and R. M. Weikle, II, , �A Broadband Quasi-Optical THz Detector Using a Zero Bias Schottky Diode,� IEEE Microwave and Wireless Components Letters, vol. 20, no. 9, Sep. 2010.

40. Lei Liu, H. Xu, A. W. Lichtenberger, and R. M. Weikle,II, �Integrated 585 GHz Hot-Electron Mixer Focal-Plane Arrays Based on Annular-Slot Antennas for Imaging Applictions,� IEEE Trans. Microwave Theory Tech., vol. 58, no. 7, 2010.

41. H. Xu, G. Schoenthal, Lei Liu, J. L. Hesler, and R. M. Weikle, II, �On Estimating Parasitic Capacitance in Submillimeter-Wave Planar Schottky Diodes,� IEEE Microwave and Wireless Components Letters, vol. 19, no. 2, 2009.

42. Lei Liu, H. Xu, J. Hesler, A. W. Lichtenberger, R. M. Weikle, II, �Integrated Broadband Terahertz Detectors Utilizing Superconducting Hot-Electron Bolometers,� IEEE Trans. on Appl. Supercon., vol. 19, no. 3, pp. 282-286, June 2009.

43. B. Herald, J. Schultz, H. Xu, Lei Liu, A. W. Lichtenberger, R. M. Weikle, II, �The Design, Fabrication, and Test Results of a 1.6 THz Hot-Electron Mixers with Beam Leads,� IEEE Trans. on Appl. Supercon., vol. 19, no. 3, June 2009.

44. Lei Liu, Q. Xiao, J. C. Schultz, H. Xu, A. W. Lichtenberger, and R. M. Weikle, II, �Design, Fabrication and Characterization of a Submillimeter-Wave Niobium HEB Mixer Imaging Array Based on the �Reverse-Microscope� Concept,� IEEE Trans. on Appl. Supercon., vol. 17, no. 2, pp. 407-411, Jun. 2007.

45. Lei Liu, C. Caloz, and T. Itoh, "Dominant Mode (DM) Leaky Wave Antenna with Backfire-to-Endfire Scanning Capability," Electron. Lett. vol.38, no. 23, Nov. 06, 2002.

46. Lei Liu, C. Caloz, C-C. Chang, and T. Itoh, "Forward Coupling Phenomena between Artificial Left-Handed (LH) Transmission Lines," J. Appl. Phys., vol.92, no.9, pp.5560, Nov.1, 2002.

47. Lei� Liu,� Y. J. Feng, Q. G. Liu, L. Y. Wu,� E. H. Zhao, Z. L. Fu, L. X. You, L. Kang, S. Z.Yang, and P. H. Wu, �Local Microwave Properties of Metal Films Studied by a Microwave Near-Field Microscope,� Solid State Communications, vol.119, no.3, p.133-5. 2001.

48. Y. J. Feng, Lei Liu, et. al, "Local Microwave Surface Resistance Variations of The YBaCuO Thin Films Patterned by Selective Laser Irradiation and Plasma Fluorination," IEEE Trans. on Appl. Supercon., vol.11, p.123-6. 11., March 2001.

 

 

 

Selected Conference Papers:

 

1. Lei Liu, J. Ren, Y. Deng, Y. Shi, P. Fay, and L.-J. Cheng, �Optically-controlled� tunable/reconfigurable THz devices for advanced sensing, imaging and communications,� 2018 European Microwave Week (EuMW), Workshop on THz Technologies, Madrid, Spain, Sep. 23-28, 2018 (Invited Talk).

2. Y. Shi, S. Rahman, J. Ren, Y. Deng, P. Fay, Lei Liu, �An integrated polarization-resolved quasi-optical THz detector based on heterostructure backward diodes,� Lester Eastman Conference on High Performance Devices, Columbus, OH, Aug. 12-14, 2018.

3. Lei Liu, �Optically-controlled millimeterwave to THz tunable/reconfigurable devices for advanced imaging and adaptive communication,� 2018 ShanghaiTech Workshop on Emerging Devices, Circuits and systems (SWEDCS�2018), Shanghai, China, June 04-05, 2018 (Invited Talk).

4. Y. Deng, M. I. B. Shams, J. Ren, P. Fay, and Lei Liu, �High performance photo-induced substrate-integrated waveguides for tunable and reconfigurable terahertz circuits,� 29th International Symposium on Space Terahertz Technology, Pasadena, CA, USA, March 26-28, 2018.

5. J. Ren, Y. Deng, Z. Jiang, M. I. B. Shams, P. Fay, and Lei Liu, �Tunable and reconfigurable terahertz devices based on photo-induced electromagnetic band gap structures,� 29th International Symposium on Space Terahertz Technology, Pasadena, CA, USA, March 26-28, 2018.

6. Lei Liu, Z. Jiang, M. I. B. Shams, J. Ren, P. Fay, �Optically-controlled tunable and reconfigurable THz devices,� IEEE National Aerospace and Electronics Conference, Fairborn, OH, June 26-28, 2017 (Invited Talk).

7. J. A. Connors, C.-Y. E. Tong, P. K. Grimes, A. Gebreyohannes, and Lei Liu, �Measurement and design of a waveguide probe based WR 3.4 optically controlled modulator,� 28th International Symposium on Space Terahertz Technology, University of Cologne, Cologne, Germany, Mar. 13-15, 2017.

8. Lei Liu, Z. Jiang, M. I. B. Shams, S. Rahman, P. Fay, �Dynamically tunable and reconfigurable� antennas for advanced THz sensing and imaging,� USNC-URSI National Radio Science Meeting� (NRSM), Boulder, CO, Jan. 4-6, 2017 (Abstract).

9. Jiang, S. Rahman, P. Fay, S. T. Ruggiero, Lei Liu, �Ultra-sensitive broadband terahertz quasi-optical balanced hot-electron mixers,� IEEE Applied Superconductivity Conference, Denver, CO, Sep. 4-9, 2016.

10. Lei Liu, Z. Jiang, M. I. B. Shams, P. Fay, L.-J. Cheng, �Tunable and reconfigurable THz devices for advanced imaging and adaptive wireless communications,� SPIE Optics + Photonics, San Diego, CA, Aug. 29-Sep. 1, 2016 (Invited Talk).

11. P. Fay, W. Li, S. Rahman, Z. Jiang, Lei Liu, �Advances in III-V heterostructure devices and integration for millimeter-wave and THz sensing and imaging,� Workshop on Compound Semiconductor Devices and Integrated Circuits, May, 2016 (Invited Talk).

12. Z. Jiang, M. I. B. Shams, S. Rahman, P. Fay, C. E. Tong, and Lei Liu, �A WR-4 optically-tunable waveguide attenuator with 50 dB tuning range and low insertion loss,� 27th International Symposium on Space Terahertz Technology, Nanjing, China, Apr. 12-15, 2016.

13. M. I. B. Shams, Z. Jiang, J. Qayyum, S. Rahman, P. Fay, and Lei Liu, �A terahertz reconfigurable photo-induced Fresnel-zone-plate antenna for dynamic two-dimensional beam steering and forming,�� IEEE International Microwave Symposium (IMS), Phoenix, AZ, May 2015.

14. M. I. B. Shams, H. G. Xing, P. Fay, and Lei Liu, �Initial demonstration of THz beem-steering with photo-induced reconfigurable Fresnel zone-plates,�� IEEE Calumet Section EDS/IPS Symposium, Notre Dame, IN, 2014.

15. S. Rahman, Z. Jiang, H. G. Xing, P. Fay, and Lei Liu, �Integration of heterostructure backward diodes with submicron airbridge contacts for 585 GHz focal-plane imaging arrays,� IEEE Calumet Section EDS/IPS Symposium, Notre Dame, IN, 2014.

16. S. Rahman, Z. Jiang, H. G. Xing, P. Fay, and Lei Liu, �Design, fabrication and characterization of 585GHz integrated focal-plane arrays based on heterostructure backward diodes,� ,The 39th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Tucson AZ, 2014 (Keynote Oral Presentation).

17. M. Shams, S. Rahman, Z. Jiang, J. Qayyum, H. G. Xing, J. L. Hesler, P. Fay, and Lei Liu, �Characterizing a WR-1.5 diagonal horn antenna using photo-induced coded-aperture imaging,� The 39th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Tucson AZ, 2014.

18. P. Fay, Y. Xie, Y. Zhao, Z. Jiang, S. Rahman, B. SensaleRodriguez, H. G. Xing, and Lei Liu, �Emerging electronic device for THz sensing and imaging,� SPIE, 2014 (Invited Talk).

19. Z. Jiang, S. Rahman, P. Fay, S. T. Ruggiero, and Lei Liu, �The design, fabrication and characterization of ultra-sensitive multiband terahertz quasi-optical balanced hot-electron mixers,� IEEE Applied Superconductivity Conference, Charlotte, NC, Aug. 10-15, 2014, accepted.

20. Z. Jiang, S. Rahman, I. M. Shames, P. Fay, J. L. Hesler, and Lei Liu, �A 200 GHz lens-coupled annular-slot antenna with 50 GHz tuning range for reconfigurable terahertz detectors� IEEE International Microwave Symposium (IMS 2014), Tampa, FL, June 2-6, 2014.

21. M. Shams, Z. Jiang, S. Rahman, J. Qayyum, and Lei Liu, �Approaching real-time terahertz imaging using photo-induced reconfigurable aperture arrays,� Oral Presentation, SPIE Defense and Security,Baltimore, Maryland, 2014.

22. Z. Jiang, S. Rahman, P. Fay, S. T. Ruggiero, and Lei Liu, �Multiband terahertz quasi-optical balanced hot-electron mixers based on dual-polarization sinuous antennas,� Oral Presentation, SPIE Defense and Security, Baltimore, Maryland, 2014.

23. R. Yan, D, Jena, B. Sensale-Rodriguez, Lei Liu, H. G. Xing, �Near-field enhanced graphene terahertz modulators,� The 38th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Mainz, Germany, Sep. 1-6, 2013.

24. R. Yan, S. Rafique, W. Li, X. Liang, D. Jena, Lei Liu, B. Sensale-Rodriguez, H. G. Xing, �Tunable graphene-based metamaterial terahertz modulators,� CLED: Science and Innovation, San Jose, CA, June 2013.

25. S. Rahman, Z. Jiang, Y. Xie, H. Xing, P. Fay, Lei Liu, �Terahertz focal-plane arrays employing heterostructure backward diodes integrated with folded dipole antennas,� IEEE International Microwave Symposium (IMS 2013), Seattle, WA, June 2-7, 2013,

 

 

Integrated THz Heterostructure Backward Diode with Airbridge

Terahertz High-Performance Focal-Plane Array Using Planar Lens-Coupled Antennas

590 GHz THz Coded-Aperture Imaging of a letter �H� Using Compressed Sensing

THz Circuits and Systems Lab