Facilities

Professor Timp is the Keough-Hesburgh Chair Cross Appointment between Biological Sciences and Electrical Engineering departments at Notre Dame. He has laboratory space in both Galvin Life Sciences and the newly constructed Stinson-Remick Hall. - The new building also houses the Notre Dame Integrated Imaging Facility, which serves the science and engineering research communities by integrating three areas of the University?s imaging expertise: electron microscopy, optical microscopy and in vivo imaging.

cleanroom

The newly constructed 11,800 square foot semiconductor processing and device fabrication cleanroom facilities in Stinson Remcik are one of the nation?s largest and most sophisticated university-based facilities for semiconductor, nanotechnology, and biotechnology research. It contains over 8,000 square feet of class 100 and class 1000 clean room laboratory and state-of-the-art ultra-high-speed optical and electrical device and circuit measurements. This end-to-end MOS processing line will enable us to fabricate and perfect the solid state architecture of the nanopores; one of many projects that include the use of the cleanroom facilities.

Housed in recently-completed certified cleanroom space within Stinson-Remick Hall at Notre Dame, the NDNF includes approximately 9,000 net square feet (white space) of cleanroom. The facility is approximately 50% ISO class 5 (class 100), 40% ISO class 6 (class 1000) and 10% ISO class 7 (class 10,000). The facility includes a comprehensive toolset supporting CMOS, III-V, and MEMS fabrication. Key capabilities include contact and projection optical lithography, electron-beam direct write lithography with demonstrated resolution to less than or equal to 4 nm, in-house mask making for rapid turn-around of designs, reactive-ion etching (RIE), inductively-coupled RIE (ICP-RIE, DRIE), plasma etching, thermal and electron-beam evaporation, dc and magnetron sputtering for metal deposition, plasma-enhanced chemical vapor deposition (PECVD), atomic-layer deposition (ALD), atmospheric-pressure CVD, low-pressure CVD, and magnetron sputtering for dielectric deposition, automated chemical-mechanical polishing (CMP), rapid thermal annealing and constant-temperature furnace thermal processing, and general wet chemistry. Several significant upgrades are planned in 2010, including the addition of a high-throughput, high-resolution electron beam lithography system (Vistec EBPG-5200), an I-line projection lithography stepper, two additional sputter deposition systems and an additional metal evaporation system.

Stinson Remick Microscopy: The newly constructed Stinson Remick microscopy suite features a Jeol 2010 TEM as well as an FEI state-of-the-art Titan TEM for drilling nanopores. The Titan is ideally suited for varying slit size of the nanopores as well as allowing different modes for pore geometry. The facility also contains an FEI Scanning Electron Microscope (SEM) and a new FEI Focused Ion Beam (FIB) machine.

Stinson-Remick Laboratories: Rooms 200, 229, and 230 The Timp labs are part of the 142,000 square foot facility that houses the nanotechnology research center. With approximately 3,500 sq ft of dedicated laboratory space, the labs contains cell culture facilities for general use as well as separate biological safety class II+ facilities for human cell cultures. Other amenities include two newly constructed quiet rooms which are uniquely well adapted for single molecule detection work, a newly constructed cold room. The labs are equipped with benches and measurement apparatus, TMC optical Tables, Zeiss Axio Observer microscopes, Optical Tweezing, FRET, Newport SpectraPhysics Lasers, CCD cameras, freezers, refrigerators, incubators, ovens, and all the equipment necessary for cross disciplinary studies in molecular biology and nanoelectronics.

Room 52 Galvin Life Sciences houses TMC optical tables, incubators, freezers, refrigerator, Zeiss microscopes, shakers, a Spectra Physics Laser, and all the equipment necessary for cross disciplinary studies in molecular biology and nanoelectronics.

Additional Links

Notre Dame Engineering Dept: http://www.nd.edu/~engineer/

Notre Dame Department of Biological Sciences: http://biology.nd.edu/

Advanced Diagnostics and Therapeutics group: http://advanceddiagnostics.nd.edu/about/

Wikipedia: http://en.wikipedia.org/wiki/University_of_Notre_Dame

Campus Map: http://www.nd.edu/campus-and-community/campus-map/