Facilities
Metrology Equipment
- Filmetrics F40
- Manufacturer:
Filmetrics, Inc. - Operating Instructions
Description
The Filmetrics F40 is uses spectral reflectance to measure the thickness of transparent and semi-transparent thin films. Measured films must be optically smooth and between 300 Angstroms and 50 microns thick. The F40 attaches to a microscope’s c-camera mount fitting to provide a measurement spot size as small as 5 microns square. Commonly measured films include semiconductor process films such as oxides, nitrides, resists, and polysilicon, optical coatings such as hardness and anti-reflection coatings, flat panel display films such as polyimides, resist, and cell gaps, and the various coatings used in CD and DVD manufacture. Films that cannot be measured include very rough films and opaque films.
Allowed Materials
Semiconductor materials, dielectric films, and thin metal layers.
Prohibited Materials
Organics and liquids of any kind.
Cleaning procedure
Samples to be used in the metrology equipment should be free of greases, oils, fingerprints, and particles. If necessary, samples should be cleaned in solvents, followed by DI rinse and N2 blow dry. Particular attention should be paid to the back side of the sample.
Contact Information:
For additional information, please contact the NDNF Staff at pfay@nd.edu.
03.28.16
