Facilities
Deposition Equipment
- Varian Thermal Vacuum Deposition System
- Manufacturer:
Varian, Inc. - Operating Instructions
Description
The Varian is a thermal vacuum deposition system. This unit has 4 pocket turret system that allows for deposition of different films without the need to open the chamber.
Film types available on the Varian are: AuGe, Ni, Au, and Cr.
Contact Information:
For additional information, please contact the NDNF Staff at pfay@nd.edu.
2.10.15
