Facilities
Metrology Equipment
- V-VASE®
Variable Angle Spectroscopic Ellipsometer - Manufacturer:
J. A. Woollam Co., Inc. - Operating Instructions
Description
The VASE® is a Variable Angle Spectroscopic Ellipsometer and
features totally automated thin film characterization, high-precision
angle, and a wide spectral range (240nm to 1700nm). It has a vertical
sample mounting, automated sample mapping, and focused spot size.
Some of the key benefits are: highest precision and accuracy of
any Spectroscopic Ellipsometer, totally automated angle of incidence,
nondestructive materials analysis, easily characterize all types
of materials: semiconductors, dielectrics, polymers, metals, multilayers,
and more
The VASE® has an optional AutoRetarder™ which is a patented
measurement technique that provides the most accurate data. Most
types of ellipsometers have data regions where they are less sensitive.
The AutoRetarder™ overcomes this for any sample. The AutoRetarder™
increases the flexibility of the VASE®. It allows measurement
of delta from 0° to 360° with no problem areas. This is
very beneficial for samples such as transparent films on transparent
substrates, where it is difficult to find angles of incidence with
delta away from 0° or 180°. The AutoRetarder™ also allows
more complex measurements. It has been successfully used with anisotropic
samples and to measure the sample depolarization. Complicated structures
require the most accurate data, which is what you get with the
AutoRetarder™.
Allowed Materials
Semiconductor materials, dielectric films, and thin metal films.
Prohibited Materials
Organics and liquids of any kind.
Cleaning procedure
Samples to be used in the metrology equipment should be free of greases, oils, fingerprints, and particles. If necessary, samples should be cleaned in solvents, followed by DI rinse and N2 blow dry. Particular attention should be paid to the back side of the sample.
Contact Information:
For additional information, please contact the NDNF Staff at pfay@nd.edu.
06.29.15
