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Facilities

Deposition Equipment

Description

The Denton Explorer® 14 e-beam evaporator is a customized system equipped with an elongated chamber for increased film uniformity.  The system has a PID temperature control system, providing the ability to heat and control process temperatures. The system has a water-cooled, flux shield / aperture plate that can be used to minimize substrate heating and film migration. Endpoint detection is implemented through the Inficon XTC/2 quartz crystal rate controller interfaced to programmable logic controller. 

In addition, the Denton has a Physik Instrumente (PI) E-710 digital piezo controller installed. It is designed for NanoPositioning applications and its associated three-axis flexure stage is capable of sub-nanometer positioning, which allows research in fields such as litho-free patterning.

Film types available: Al, Al₂O₃, Ge, Ni, SiO₂, W, Hf, Ti, Cr, Si, Mo, and p-doped Si.

Contact Information:

For additional information, please contact the NDNF staff at pfay@nd.edu.

 

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