Facilities
Equipment List
Categories: Deposition
| Etch
| General Fabrication
| Lithography
Metrology
| Packaging
| Other
Etch
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ALCATEL 601E INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCH (ICP RIE) SYSTEM |
PLASMA THERM 790 REACTIVE ION ETCH
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DRYTEK MEGA STRIP 5 PLASMA ASHER |
PVA PS210 MICROWAVE PLASMA ASHER |
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MEMSSTAR BT001 XENON DIFLUORIDE (XeF2) ETCH SYSTEM |
TeGAL BARREL ASHER |
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OERLIKON INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCH
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UVO CLEANER |
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OXFORD INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCH
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