Facilities
Equipment List
Categories: Deposition
| Etch
| General Fabrication
| Lithography
Metrology
| Packaging
| Other
Lithography
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COBILT MODEL CA-800 WAFER TO MASK ALIGNMENT AND
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OAI LIGHT SOURCE |
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GCA AUTOSTEP 200
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SUSS MJB 3 MASK ALIGNERS (2) |
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GCA MANN 3600F PHOTOMASK PATTERN GENERATOR |
TAMARACK SERIES 142
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LINDBERG/BLUE M RESIST BAKING OVEN |
VISTEC EBPG5200 ELECTRON BEAM LITHOGRAPHY SYSTEM |
