Facilities
Equipment List
Categories: Deposition
| Etch
| General Fabrication
| Lithography
Metrology
| Packaging
| Other
Deposition
|
|
|||
AIRCO TEMESCAL MODEL FC-1800 #1 ELECTRON BEAM VACUUM DEPOSITION/
|
OERLIKON LEYBOLD 3-CHAMBER, 16-TARGET UHV SPUTTERING SYSTEM FOR MAGNETIC MATERIALS |
|
|
|||
AIRCO TEMESCAL MODEL FC-1800 #2 ELECTRON BEAM VACUUM DEPOSITION/
|
OERLIKON LEYBOLD 8-POCKET ELECTRON BEAM, DUAL THERMAL EVAPORATION SYSTEM |
|
|
|||
AIRCO TEMESCAL MODEL FC-1800 #3 ELECTRON BEAM VACUUM DEPOSITION/
|
OXFORD FlexAL REMOTE PLASMA AND THERMAL ALD SYSTEM |
|
|
|||
DENTON EXPLORER®
|
PERKIN-ELMER 2400 SPUTTERING SYSTEM |
|
|
|||
EMITECH K675X
|
SAVANNAH 100 ATOMIC LAYER DEPOSITION (ALD) TOOL |
|
|
|||
FIRST NANO EASY TUBE 6000® FURNACE SYSTEM |
UNAXIS 790 SERIES PLASMA ENHANCED CHEMICAL VAPOR
|
 |
|
|||
GENERAL AIR CVD SYSTEM |
VARIAN THERMAL VACUUM DEPOSITION SYSTEM |
 |
|
|||
LESKER ALD150LX ATOMIC LAYER DEPOSITION (ALD) SYSTEM |
VEECO EVAPORATOR |
 |
||||
OERLIKON LEYBOLD 5-TARGET UHV SPUTTERING SYSTEM |
|
