Facilities
Deposition Equipment
- Emitech K675X Sputter Coater System
- Manufacturer:
Emitech - Operating Instructions
Description
The Emitech K675X is a sputter coater system. The K675X coating system employs a magnetron target assembly that enhances the efficiency of the sputtering process using low voltages, giving a thin and fine-grain coating. There are three such target assemblies in the K675X, positioned to give coating over a large diameter that, together with a rotating sample table, ensures even depositions. The system has twin gear rotating sample stages, giving a progressive elliptical rotation for even sputtering deposition.
The stage is also equipped with a Peltier cooling feature to ensure appropriate water temperature is maintained.
The system is typicaly used to sputter coat chrome onto SEM samples for image enhancement.
Film types available on the Emitech K675X are: Cr, Co, W, Cu, Ti, Ni, Al, and permalloy.
Contact Information:
For additional information, please contact the NDNF staff at pfay@nd.edu.
2.10.15
