Facilities

Equipment List

Categories: Deposition | Etch | General Fabrication | Lithography
                   Metrology | Packaging | Other

Metrology

 

AGILENT B1500A SEMICONDUCTOR DEVICE ANALYZER

HITACHI S-4500 FIELD EMISSION
SCANNING ELECTRON MICROSCOPE
(FESEM) #1
 

ALPHA-STEP 500 PROFILER

KLA-TENCOR P-6 SURFACE PROFILER
 

CASCADE M150 TEST STATION

OLYMPUS LEXT OLS4100 CONFOCAL MICROSCOPE
 

FILMETRICS F40

OLYMPUS OPTICAL MICROSCOPES
 

FOUR POINT
RESISTIVITY PROBE

FPP 5000
4-POINT PROBE
 

V-VASE® VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETER

GAERTNER ELLIPSOMETER