Metrology Equipment

  • Olympus Optical Microscopes
  • Manufacturer:


Various optical microscopes are available for use in the lab with magnifications ranging from 2.5x up to 100x. Various optical filters and lighting features (bright/dark field, back light) are standard on most inspection scopes. Further data analysis can be performed using the Olympus Stream basic software. Stream is an advanced micro-imaging software that allows users to acquire, process, and measure images, which assists to create valuable data and reports. Software customization can easily provide sophisticated results with simple flexible operation.

- Olympus SZX16 Stereoscopic Microscope
- Olympus MX51 with 20x, 50x, and 100x Infrared Lenses
- Olympus MX51 with UC50 Digital Camera
- Olympus MX61 Optical Scope with UC50 Digital Camera

Allowed Materials

Semiconductor-based materials, dielectrics, metal films, and resists.

Prohibited Materials

Organic materials, greases and epoxies, and liquids of any kind.

Cleaning procedure

Samples generally do not require special cleaning, unless needed to remove prohibited materials before processing. All materials to enter the equipment will be handled with wafer tongs by an operator wearing latex, poly, or nitrile clean gloves.

Contact Information:

For additional information, please contact the NDNF Staff at pfay@nd.edu.


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