Metrology Equipment


A Kulicke and Soffa Industries, Inc. Model 3007 four-point in-line probe is used in conjunction with a Keithley model 530 Type-All system to make applicable characterization measurements. The Keithley model 530 Type-All system is an electronic system designed for measurement of resistivity and determination of conductivity type of a semiconductor. The Keithley system contains a precision current source, digital microvoltmeter, in conjunction circuitry needed for resistivity and typing determinations.  

Allowed Materials

Si, Ge,C, GaAs and its compounds, InP and its compounds, cleaned SiO2 (glass), and cleaned Al2O3 (sapphire).

Prohibited Materials

Organics, greases, and other materials that may contaminate the probes.

Cleaning procedure

Samples to be used in the metrology equipment should be free of greases, oils, fingerprints, and particles. If necessary, samples should be cleaned in solvents, followed by DI rinse and N2 blow dry. Particular attention should be paid to the back side of the sample.

Contact Information:

For additional information, please contact the NDNF Staff at pfay@nd.edu.


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