Metrology Equipment

  • V-VASE®
    Variable Angle Spectroscopic Ellipsometer
  • Manufacturer:
    J. A. Woollam Co., Inc.
  • Operating Instructions


The VASE® is a Variable Angle Spectroscopic Ellipsometer and features totally automated thin film characterization, high-precision angle, and a wide spectral range (240nm to 1700nm). It has a vertical sample mounting, automated sample mapping, and focused spot size. Some of the key benefits are: highest precision and accuracy of any Spectroscopic Ellipsometer, totally automated angle of incidence, nondestructive materials analysis, easily characterize all types of materials: semiconductors, dielectrics, polymers, metals, multilayers, and more

The VASE® has an optional AutoRetarder™ which is a patented measurement technique that provides the most accurate data. Most types of ellipsometers have data regions where they are less sensitive. The AutoRetarder™ overcomes this for any sample. The AutoRetarder™ increases the flexibility of the VASE®. It allows measurement of delta from 0° to 360° with no problem areas. This is very beneficial for samples such as transparent films on transparent substrates, where it is difficult to find angles of incidence with delta away from 0° or 180°. The AutoRetarder™ also allows more complex measurements. It has been successfully used with anisotropic samples and to measure the sample depolarization. Complicated structures require the most accurate data, which is what you get with the AutoRetarder™.

Allowed Materials

Semiconductor materials, dielectric films, and thin metal films.

Prohibited Materials

Organics and liquids of any kind.

Cleaning procedure

Samples to be used in the metrology equipment should be free of greases, oils, fingerprints, and particles. If necessary, samples should be cleaned in solvents, followed by DI rinse and N2 blow dry. Particular attention should be paid to the back side of the sample.

Contact Information:

For additional information, please contact the NDNF Staff at pfay@nd.edu.


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