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Metrology Equipment

Description

The FPP 5000 is a four-point probe used for the measurement of resistive properties of semiconductor wafer and resistive films. Its microprocessor based electronics permits direct computation of V/I, sheet or slice resistivity, metalization thickness and P-N type testing. The electronics and probing mechanism are contained in a single compact package. The rugged cast aluminum housing assures mechanical integrity of the probe mechanism. The probing mechanism features a constant force probe head, which is rigidly fixed in the housing.

Allowed Materials

Si, Ge,C, GaAs and its compounds, and InP and its compounds.

Prohibited Materials

Organics, greases, and other materials that may contaminate the probes.

Cleaning procedure

Samples to be used in the metrology equipment should be free of greases, oils, fingerprints, and particles. If necessary, samples should be cleaned in solvents, followed by DI rinse and N₂ blow dry. Particular attention should be paid to the back side of the sample.

Contact Information:

For additional information, please contact the NDNF Staff at pfay@nd.edu.

06.29.15

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