Metrology Equipment


The LEXT OLS4100 is a laser scanning microscope used to perform non-contact 3D observations and measurements of surface features at 10 nm resolutions (Z axis) and 120 nm width (X and Y axis). The system is equipped with standard 5x, 10x, 20x, 50x, and 100x optical lenses and a 405 nm laser. It also incorporates a digital zoom for enhanced image analysis. The system's software allows for several analytical techniques to be performed. Line and surface roughness, step height measurement, particle analysis, surface area and volume, distance and much more. The system easily captures and records images as 3D images in both optical and wire frame displays. Large image stitching (25 x 25 arrays) can be set up and automatically recorded to allow data acquisition on samples as large as 1" square.

Allowed Materials

Semiconductor-based materials, dielectrics, metal films, and resists.

Prohibited Materials

Magnetic materials, organics, epoxy, rubbers, and plastics. Organic materials and liquids of any kind.

Cleaning procedure

Samples generally do not require special cleaning, unless needed to remove prohibited materials before processing. All materials to enter the equipment will be handled with wafer tongs by an operator wearing latex, poly, or nitrile clean gloves.

Contact Information:

For additional information, please contact the NDNF Staff at pfay@nd.edu.


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