Facilities
Deposition Equipment
- Model FC-1800 #3
Electron Beam Vacuum Deposition/Thin-Film Coater System - Manufacturer:
AIRCO Temescal - Operating Instructions
Description
The Model FC-1800 is an electron beam vacuum deposition/thin film coater system. This unit has a four-pocket crucible system for deposition of multiple films without the need to open the chamber.
Also installed in the evaporator is a wafer chuck that can be cooled down to 77K (LN2) temperatures for special processing.
Film types available: Ag, Al, AlSi-2%, Cr, Cu, Ge, Mo, Ni, Sc, Si, Sn, Ta, Ti, W, Permalloy, and Supermalloy.
Contact Information:
For additional information, please contact the NDNF staff at pfay@nd.edu.
