Deposition Equipment

  • Model FC-1800 #3
    Electron Beam Vacuum Deposition/Thin-Film Coater System
  • Manufacturer:
    AIRCO Temescal
  • Operating Instructions


The Model FC-1800 is an electron beam vacuum deposition/thin film coater system. This unit has a four-pocket crucible system for deposition of multiple films without the need to open the chamber.

Also installed in the evaporator is a wafer chuck that can be cooled down to 77K (LN2) temperatures for special processing.

Film types available: Ag, Al, AlSi-2%, Cr, Cu, Ge, Mo, Ni, Sc, Si, Sn, Ta, Ti, W, Permalloy, and Supermalloy.

Contact Information:

For additional information, please contact the NDNF staff at pfay@nd.edu.

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