Facilities
Lithography Equipment
- OAI Light Source
- Manufacturer:
OAI - Operating Instructions
Description
The OAI light source is a high-performance collimated illumination system intended for UV flood exposure related applications. The system has an external timer that controls a shutter inside the light source in 0.1 second increments up to 999.9 seconds.
Allowed Materials
Semiconductor materials, dielectric and metal thin films, resists.
Prohibited Materials
Organics, liquids and greases of any kind.
Cleaning procedure
Mike to provide general cleaning procedure.
Contact Information:
For additional information, please contact the NDNF Staff at pfay@nd.edu.
