Facilities
Lithography Equipment
- Resist Baking Oven
- Manufacturer:
Lindberg/Blue M
Allowed Materials
Semiconductor materials, dielectrics, thin metal films, resists and quartz ware.
Prohibited Materials
Organics, greases, and liquids of any kind.
Contact Information:
For additional information, please contact the NDNF Staff at pfay@nd.edu.
6.29.15
