New Instrument Produces Nanostructures without Lithography
A
team of researchers led by Alan C. Seabaugh, professor
of electrical engineering and associate director of the Center for
Nano Science and Technology, has developed a new instrument
capable of positioning vacuum-deposited metals, semiconductors, and
dielectrics with nanometer-scale resolution without organic resists
and customized masks (traditional lithography). Instead a precision
nanopositioner is used to translate a substrate under a stencil mask
between evaporation of dissilimar materials. This piezoflexure-enabled
nanofabrication (PEN) techniquecan produced features at the nanometer
scale. The PEN system allows for the clean characterization on surfaces
near room temperature. |
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